Axcelis Technologies Inc

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U.S. Patents

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  • Patent Title: Dual source injector with switchable analyzing magnet Oct. 08, 2024
  • Patent Title: Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam Jul. 30, 2024
  • Patent Title: Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism Mar. 05, 2024
  • Patent Title: Toxic outgas control post process Feb. 13, 2024
  • Patent Title: Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity Jan. 30, 2024
  • Patent Title: Dual source injector with switchable analyzing magnet Nov. 21, 2023
  • Patent Title: Extended lifetime dual indirectly-heated cathode ion source Oct. 24, 2023
  • Patent Title: System and method for extending a lifetime of an ion source for molecular carbon implants Sep. 12, 2023
  • Patent Title: Method for decreasing cool down time with heated system for semiconductor manufacturing equipment Aug. 15, 2023
  • Patent Title: Hydraulic feed system for an ion source Aug. 15, 2023
  • Patent Title: Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam Jul. 11, 2023
  • Patent Title: Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam Jul. 11, 2023
  • Patent Title: High power wafer cooling Jun. 06, 2023
  • Patent Title: Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control May. 09, 2023
  • Patent Title: Ion source with multiple bias electrodes Jan. 03, 2023
  • Patent Title: Ion source repeller Dec. 06, 2022
  • Patent Title: Hydrogen generator for an ion implanter Mar. 15, 2022
  • Patent Title: Stepped indirectly heated cathode with improved shielding Feb. 08, 2022
  • Patent Title: Multiple arc chamber source Nov. 23, 2021
  • Patent Title: Liquid metal ion source Nov. 09, 2021
  • Patent Title: Substrate support having customizable and replaceable features for enhanced backside contamination performance Sep. 07, 2021
  • Patent Title: Scanning magnet design with enhanced efficiency Sep. 07, 2021
  • Patent Title: Hydrogen bleed gas for an ion source housing Jul. 13, 2021
  • Patent Title: Scan and corrector magnet designs for high throughput scanned beam ion implanter Jun. 15, 2021
  • Patent Title: Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment May. 18, 2021
  • Patent Title: In-situ wafer temperature measurement and control Jan. 26, 2021
  • Patent Title: Radiant heating presoak Dec. 08, 2020
  • Patent Title: Hydrogen generator for an ion implanter Nov. 24, 2020
  • Patent Title: High throughput serial wafer handling end station Nov. 10, 2020
  • Patent Title: Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment Oct. 06, 2020
  • Patent Title: Implantation using solid aluminum iodide (ali3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Sep. 15, 2020
  • Patent Title: System and method for aligning light-transmitting birefringent workpieces Jul. 21, 2020
  • Patent Title: Reduction of condensed gases on chamber walls via heated chamber housing for semiconductor processing equipment Jul. 14, 2020
  • Patent Title: Ion source with tailored extraction shape Jul. 14, 2020
  • Patent Title: Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck Jun. 23, 2020
  • Patent Title: Film stabilization through novel materials modification of beamline components Jun. 23, 2020
  • Patent Title: Low conductance self-shielding insulator for ion implantation systems Jun. 09, 2020
  • Patent Title: Hydrogen co-gas when using aluminum iodide as an ion source material Jun. 09, 2020
  • Patent Title: Tetrode extraction apparatus for ion source Feb. 25, 2020
  • Patent Title: Scan and corrector magnet designs for high throughput scanned beam ion implanter Feb. 04, 2020
  • Patent Title: Lanthanated tungsten ion source and beamline components Jan. 14, 2020
  • Patent Title: System and method of arc detection using dynamic threshold Dec. 24, 2019
  • Patent Title: Beam profiling speed enhancement for scanned beam implanters Nov. 19, 2019
  • Patent Title: Wafer cooling system and method Sep. 03, 2019
  • Patent Title: Two-axis variable width mass resolving aperture with fast acting shutter motion Aug. 27, 2019
  • Patent Title: In situ beam current monitoring and control in scanned ion implantation systems Aug. 27, 2019
  • Patent Title: Phosphine co-gas for carbon implants Jul. 23, 2019
  • Patent Title: Ion source repeller shield comprising a labyrinth seal Jul. 23, 2019
  • Patent Title: Rf resonator for ion beam acceleration Jul. 02, 2019
  • Patent Title: Charge integration based electrostatic clamp health monitor Jun. 18, 2019
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