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Advanced Energy Industries Inc

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U.S. Patents

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  • Patent Title: Control of plasma sheath with bias supplies Nov. 12, 2024
  • Patent Title: Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system Nov. 12, 2024
  • Patent Title: Surface charge and power feedback and control using a switch mode bias system Oct. 22, 2024
  • Patent Title: Dual reverse pulse sputtering system Oct. 08, 2024
  • Patent Title: Power delivery to a plasma via inductive coupling Oct. 01, 2024
  • Patent Title: System with multiple power controllers to reduce harmonics Sep. 24, 2024
  • Patent Title: Variable inductor for plasma generator Sep. 10, 2024
  • Patent Title: Model reference adaptive control with signum projection tensor operations Sep. 03, 2024
  • Patent Title: Programmable plasma ignition profiles Aug. 27, 2024
  • Patent Title: Active switch on time control for bias supply Jul. 23, 2024
  • Patent Title: Estimation of remaining life of system components Jul. 23, 2024
  • Patent Title: Capacitance sensing systems and methods Jul. 16, 2024
  • Patent Title: High side current monitor Jun. 25, 2024
  • Patent Title: Match efficiency-variation compensation Jun. 11, 2024
  • Patent Title: Bias supply control and data processing Jun. 11, 2024
  • Patent Title: Adaptive predictive control system May. 21, 2024
  • Patent Title: Start-up voltage overshoot reduction May. 07, 2024
  • Patent Title: Transition control in a bias supply May. 07, 2024
  • Patent Title: Apparatus with switches to produce a waveform May. 07, 2024
  • Patent Title: Frequency tuning for modulated plasma systems Apr. 30, 2024
  • Patent Title: Dynamic control-setpoint modification Apr. 30, 2024
  • Patent Title: Combining the determination of single and mutual, preset preserving, impedance loads with advances in single and double sensor calibration techniques in the application of single and pairwise calibration of sensors Apr. 16, 2024
  • Patent Title: Bias supply with resonant switching Mar. 26, 2024
  • Patent Title: Simplified voltage-boosting snubber network Jan. 30, 2024
  • Patent Title: Bias supply with a single controlled switch Jan. 30, 2024
  • Patent Title: Input impedance networks with power recovery Jan. 16, 2024
  • Patent Title: Spatial monitoring and control of plasma processing environments Dec. 12, 2023
  • Patent Title: Wafer chucking monitor Dec. 05, 2023
  • Patent Title: System and method for improved electrostatic chuck clamping performance Nov. 14, 2023
  • Patent Title: Frequency tuning for modulated plasma systems Oct. 31, 2023
  • Patent Title: Control of rail voltage in multi-level pulsing rf power amplifier Aug. 08, 2023
  • Patent Title: Series stack switch circuit with voltage clamping and power recovery Jul. 25, 2023
  • Patent Title: Voltage clamp and current clamp systems with power recovery Jul. 18, 2023
  • Patent Title: Fiber optic temperature probe Jul. 04, 2023
  • Patent Title: Programmable ignition profiles for enhanced plasma ignition Jun. 27, 2023
  • Patent Title: Measurement and adjustment of a charge of a workpiece Jun. 20, 2023
  • Patent Title: Bias supply control and data processing Jun. 06, 2023
  • Patent Title: Control circuit for a power converter May. 23, 2023
  • Patent Title: Inter-period control system for plasma power delivery system and method of operating same May. 16, 2023
  • Patent Title: Inter-period control for passive power distribution of multiple electrode inductive plasma source Mar. 28, 2023
  • Patent Title: System, method, and apparatus for controlling ion energy distribution in plasma processing systems Mar. 28, 2023
  • Patent Title: Inter-period control system for plasma power delivery system and method of operating the same Mar. 21, 2023
  • Patent Title: Synchronization between an excitation source and a substrate bias supply Mar. 21, 2023
  • Patent Title: Optical gas concentration measurement apparatus Feb. 07, 2023
  • Patent Title: Optical temperature sensor with monolithic crystalline phosphor Feb. 07, 2023
  • Patent Title: Phase current balancing for multiphase coupled inductor converter Jan. 24, 2023
  • Patent Title: Wafer chucking monitor using high frequency injected ac signal Jan. 24, 2023
  • Patent Title: Generator with controllable source impedance Jan. 24, 2023
  • Patent Title: Virtual resistive load in feedback loop driving a piezoelectric actuator Dec. 27, 2022
  • Patent Title: Apparatus and system for modulated plasma systems Nov. 29, 2022
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