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MKS Instruments Inc

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Recently reported changes by institutional investors

Quarterly net insider trading by MKSI's directors and management

Government lobbying spending instances

  • $15,000 Jul 13, 2018 Issue: Homeland Security Defense
  • $15,000 Apr 19, 2018 Issue: Homeland Security Defense
  • $15,000 Jan 05, 2018 Issue: Homeland Security Defense
  • $5,000 Oct 18, 2017 Issue: Defense Homeland Security
  • $10,000 Apr 11, 2017 Issue: Defense Homeland Security
  • $10,000 Jan 12, 2017 Issue: Homeland Security Defense
  • $10,000 Oct 19, 2016 Issue: Defense Homeland Security
  • $12,000 Oct 11, 2012 Issue: Budget/Appropriations
  • $18,000 Jul 05, 2012 Issue: Budget/Appropriations
  • $18,000 Apr 02, 2012 Issue: Budget/Appropriations
  • $18,000 Jan 19, 2012 Issue: Energy/Nuclear
  • $18,000 Oct 03, 2011 Issue: Energy/Nuclear
  • $18,000 Jul 15, 2011 Issue: Science/Technology
  • $18,000 Apr 14, 2011 Issue: Budget/Appropriations
  • $6,000 Jan 10, 2011 Issue: None

Estimated quarterly lobbying spending

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U.S. Patents

New patents grants

  • Patent Title: Pulse and bias synchronization methods and systems Oct. 29, 2024
  • Patent Title: Pirani gauge with model of power dissipation Oct. 22, 2024
  • Patent Title: Demagnetizing coils for linearity improvement of current ratio of plasma processing systems Sep. 10, 2024
  • Patent Title: Plasma source having a dielectric plasma chamber with improved plasma resistance Aug. 27, 2024
  • Patent Title: Switched capacitor modulator Aug. 20, 2024
  • Patent Title: Load-lock gauge Aug. 06, 2024
  • Patent Title: Power supply apparatus Jul. 16, 2024
  • Patent Title: Method and apparatus for pressure based mass flow control Jun. 04, 2024
  • Patent Title: Real-time, non-invasive iedf plasma sensor May. 28, 2024
  • Patent Title: Extremum seeking control apparatuses with online parameter adjustment and methods May. 28, 2024
  • Patent Title: Monitoring radical particle concentration using mass spectrometry Apr. 30, 2024
  • Patent Title: Method and apparatus for impedance matching in a power delivery system for remote plasma generation Apr. 09, 2024
  • Patent Title: Thermal conductivity gauge Apr. 02, 2024
  • Patent Title: Methods and apparatus for pressure based mass flow ratio control Mar. 26, 2024
  • Patent Title: High speed synchronization of plasma source/bias power delivery Mar. 19, 2024
  • Patent Title: Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation Dec. 26, 2023
  • Patent Title: Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein Nov. 28, 2023
  • Patent Title: Impedance matching in a rf power generation system Nov. 21, 2023
  • Patent Title: Intermodulation distortion mitigation using electronic variable capacitor Nov. 07, 2023
  • Patent Title: Thermal conductivity pressure gauge with heated chamber wall Nov. 07, 2023
  • Patent Title: Load-lock gauge Oct. 31, 2023
  • Patent Title: Ion source with gas delivery for high-fidelity analysis Sep. 26, 2023
  • Patent Title: Endpoint detection of deposition cleaning in a pumping line and a processing chamber Sep. 05, 2023
  • Patent Title: Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use Aug. 22, 2023
  • Patent Title: System and method of power generation with phase linked solid-state generator modules Aug. 08, 2023
  • Patent Title: Adaptive pulse shaping with post match sensor Aug. 01, 2023
  • Patent Title: Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content Jul. 04, 2023
  • Patent Title: Method and apparatus for plasma generation May. 30, 2023
  • Patent Title: Thermal conductivity gauge May. 23, 2023
  • Patent Title: Pressure control using an external trigger Feb. 07, 2023
  • Patent Title: Switched capacitor modulator Jan. 03, 2023
  • Patent Title: System and method for arc detection using a bias rf generator signal Dec. 27, 2022
  • Patent Title: Cooling and compression clamp for short lead power devices Dec. 20, 2022
  • Patent Title: Adaptive control for a power generator Dec. 20, 2022
  • Patent Title: Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturbances Dec. 13, 2022
  • Patent Title: Ozonated water delivery system and method of use Dec. 06, 2022
  • Patent Title: Method and apparatus for pulse gas delivery using an external pressure trigger Nov. 29, 2022
  • Patent Title: Method and apparatus for pulse gas delivery with concentration measurement Nov. 29, 2022
  • Patent Title: Predictive diagnostics systems and methods using vacuum pressure control valves Oct. 25, 2022
  • Patent Title: System and method of power generation with phase linked solid-state generator modules Oct. 18, 2022
  • Patent Title: Method and apparatus for pulse gas delivery Aug. 02, 2022
  • Patent Title: Method and apparatus for deposition cleaning in a pumping line Jun. 21, 2022
  • Patent Title: Adaptive periodic waveform controller Jun. 21, 2022
  • Patent Title: Polymer composite vacuum components Jun. 21, 2022
  • Patent Title: Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in rf powered plasma applications Apr. 26, 2022
  • Patent Title: Capacitance manometer with improved baffle for improved detection accuracy Mar. 29, 2022
  • Patent Title: Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use Mar. 01, 2022
  • Patent Title: Microwave magnetron with constant anodic impedance and systems using the same Feb. 22, 2022
  • Patent Title: Intermodulation distortion mitigation using electronic variable capacitor Jan. 25, 2022
  • Patent Title: Microwave applicator with solid-state generator power source Jan. 11, 2022
Government Contracts

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